products > PARAMETRIC (WAT) PROBE CARD

STAr Virgo-SEMI probe card is ultra-low leakage current and parasitic capacitance for probe station with 115mm width probe card holder. The high-performance probe card supports SPICE modeling tests, device characterization, and reliability qualification at wide temperature range.

STAr Virgo-PRO II is production-level probe card used with Keysight 4070/4080 series parametric testers in wafer acceptance/electrical test, enabling consistent probing of small pads at high temperature for testing low-level current below 1.0 pA accurately.

STAr Virgo-PRO K is production-level parametric test probe card for Keysight 4070/4080 series testers. Applied STAr innovative Kelvin architecture with independent connection of Force and Sense ports, the series probe card is suitible for precision high-current low-voltage test of nanometer fabrication process.

STAr Virgo-PRO Z is parametric test probe card for advanced nanometer semiconductor devices testing with pads below 30 um sq. and less than 100fA leakage current at temperature up to 200 degC.

STAr Virgo PRO 62 is a cost-effective probe card used with Keysight 4062 testers for probing advanced semiconductor devices and enables low leakage measurements and small pads probing.

STAr Virgo-KS6 is production level electrical test and wafer acceptance probe card applied with Keithley S600 and constructed of high rigidity multi-layered ceramic PCB for high high quality probing of mall pads (down to 30 um square).

STAr Virgo-PRO II-HT/UT is production-level parametric test probe card used with Keysight 4070 series parametric testers and supports wide temperature range reliability and burn-in test up to 150degC (HT) and 200 degC (UT).

STAr Virgo-RPO II-ET is used with Keysight 4080 series parametric testers for production-level reliability and burn-in tests up to 300 degC and ensures stable low leakage current down to 1.0 pA under varying temperature, ensuing the test data is actual device performance.

STAr Virgo-SEMI-UT is engineering level probe cards used with parametric test instruments and probe station for wafer-level reliability tests up to 200 degC. and ensues the test data are actual device performance.

STAr Virgo-SEMI-ET is wafer-level reliability test (up to 300 degC) probe card used with parametric test instruments and engineering probe station in engineering environment. The patented "Force-Air Cooling" technology ensures the electrical and mechanical characteristics of probe cards under high temperature and reliable test results.

STAr Virgo-PRO/SEMI-XT is wafer parametric and reliability test probe card, enabling wide temperature range from -65 degC to 300 degC (400 degC) from more than 1000 hrs continuously.

STAr Virgo SEMI-HFx series is wide bandwidth cantilever-type probe cards for engineering and production high-speed (sub-ns rise time) parametric test, such as fast-BTI, Pulsed-IV, Flash memory, RAM, etc.

TAr Virgo-HF probe card employs high frequency coaxial probes with SMA connectors for high speed/frequency signal transfer. STAr will also design accompanying DC probes for ground connections so as ensure good shielding and return paths for high speed/frequency signals.

STAr Virgo-RF employs high frequency GSG, GS or SG probes with 2.4 mm connectors for RF source and measurements and can further deploy low-leakage DC probes for on-pass DC-RF test used with Keysight 4080 series parametric testers.

STAr Virgo-hiVIP is wafer acceptable test probe card for  high voltage, current and power devices, such as IGBT, DMOS and BJT, etc. The “Smart-Clamp” technology constructed with passive and active devices befitted power device testing up to 10 kV and/or 20 A and prevents probe burnt or melt when excessive voltage or current flows through the devices.

STAr Virgo PRO-XV probe card is specifically designed for high voltage testing for automotive ICs, AC-DC convertors, power MOSEFETs, IGBTs, etc., sustaining up to 15 kV at 1000 um probe spacing without arcing or breakdown at leakage current of <0.1pA/V.

STAr Virgo-ST is special thermal WAT probe card to ensure the parametric testers and probe card are under controlled environment while the wafer is under high or low temperature probing. This thermal stable environment also ensures the parametric tester within the specification temperature and test accuracy is guaranteed.

STAr has been in the forefront of WAT test probe cards and partners with our customers to develop specialized WAT probe cards for any test application and environment. With patented technologies and strength in ceramic PCB, small pad probing, high isolation, frequency, etc. 

STAr Cancer-HIC is a probe card with extremely low contact resistance and available with Kelvin (4-wire) type probing to ensure very accurate resistance measurement. The series probe card is used extensively in the laser trimming of MLC chip resistor and parallel probing of hybrid integrated circuited such as power transistors, diodes, etc.

STAr Capricorn-MS 4-axes positioner 16-site probe station applies Virgo-MULTI probe card for high temperature low-leakage current advanced wafer-level reliability tests. These cost-effective probe cards can be easily attached to the multi-site Capricorn-MS positioner with temperature of up to 300 degC and pad size down to 35 um sq. 

STAr Virgo-MF probe card supports a maximum of 300mm wafer one touch-down multi-site probing with down to 70um pitch and 50 um sq. pad size devices. Options for up to 350 degC high temperature multi-sit wafer level reliability (WLR) tests with below pic-ampere level leakage current.

STAr Virgo-MP is the probe card used with STAr Capricorn-MP 6-axes multi-site positioner and highly suitable for flexible multi-site probing in wafer-level reliability tests. The Capricorn-MP with Virgo-MP can be placed directly onto Cascade or Suss engineering probe station without the need for expensive probe card holders.